Heat dissipation in partially perforated phononic nano-membranes with periodicities below 100 nm - École Centrale de Lyon
Article Dans Une Revue APL Materials Année : 2022

Heat dissipation in partially perforated phononic nano-membranes with periodicities below 100 nm

Résumé

Understanding how thermal-phonon paths can be shaped is key for controlling heat dissipation at the nanoscale. Thermophononic crystals are periodic porous nanostructures with thermal conductivity deviating from effective medium theory, which is possible if the characteristic sizes are of the order of phonon mean free paths and/or if phonons are forced to flow in privileged directions. We investigate suspended silicon nanomembranes with a periodic array of partially perforated holes of original paraboloid shape, with all characteristic lengths below 100 nm. Results from scanning thermal microscopy, a thermal sensing technique derived from atomic force microscopy, indicate that partial perforation of the membranes impacts heat conduction moderately, with the holey crystals showing a thermal conductivity reduction by a factor 6 in comparison to the bulk and a factor 2.5 in comparison to the non-perforated membrane. The impact of the phononic shapes is analyzed in light of a complementary Monte Carlo ray-tracing estimate of the effective phonon mean free paths that include multiple phonon reflection and highlights phonon backscattering.
Fichier principal
Vignette du fichier
Massoud_2022_5.0091539.pdf (6.42 Mo) Télécharger le fichier
Origine Fichiers éditeurs autorisés sur une archive ouverte

Dates et versions

hal-03682509 , version 1 (31-05-2022)

Licence

Identifiants

Citer

Antonin Massoud, Valeria Lacatena, Maciej Haras, Emmanuel Dubois, Stéphane Monfray, et al.. Heat dissipation in partially perforated phononic nano-membranes with periodicities below 100 nm. APL Materials, 2022, 10 (5), pp.051113. ⟨10.1063/5.0091539⟩. ⟨hal-03682509⟩
95 Consultations
51 Téléchargements

Altmetric

Partager

More