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Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope

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hal-03903336 , version 1 (16-12-2022)

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Eva Kempf, Pierre Labeye, Philippe Grosse, Frédéric Boeuf, Stephane Monfray, et al.. Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope. ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC), Sep 2021, Grenoble, France. pp.179-182, ⟨10.1109/ESSDERC53440.2021.9631793⟩. ⟨hal-03903336⟩
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