Epitaxy HfO2 Silicon Nanoparticles 7550Pp Nitridation SiC Isotopic Tracing Topological defects Nuclear reaction analysis 27Ald p&α Ageing XRD Epitaxial growth Thin films Adsorbed layers 17Opp Density functional theory Thin film Passivation Indium oxide ADSORPTION DESORPTION HYSTERESIS Aluminum Multilayer Nanostructures Raman spectroscopy Magnetization curves Silicon Carbide 8140Ef Evaluation Pulsed laser deposition Defects ALD Ion beam analysis Oxidation 7630Lh 18O Nickel EPR 17O Diffusion Auger electron spectroscopy AES Al2O3 NRP Energy loss Aluminium Acoustic propreties of solid RBS 3C-SiC Gold Hysteresis Pb centers Rutherford backscattering spectrometry RBS Channeling Annealing X-ray diffraction Stable isotopic tracing 27Aldp Ion implantation Growth Zinc oxide 2H Gallium oxide Silica Adsorption Isotherms Charge exchange Capillary condensation Nuclear resonance profiling NRP Interface defects Oxygen deficiency Magnetic anisotropy Topological insulators AFM PIXE Measurement GaMnAs 17Op 13C Atomic Layer Deposition ALD Ferromagnetic resonance Kossel diffraction Transparent conductive oxide TCO Magnetic semiconductors NRA Metal-insulator transition Alloys 27Alda Silicon carbide Low energy electron diffraction LEED AC susceptibility XPS Adsorption Periodic multilayer Sputtering 15N Photoluminescence 18O resonance Acoustic 6855Jk 7550Ee